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  7. » HiPace® 2800 IUT with TC 1200, DN 250 ISO-F, DN 40

HiPace® 2800 IUT with TC 1200, DN 250 ISO-F, DN 40

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Order numberPM P05 246
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  1. OmniControl 200 with PKR 361, 25 KF

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  2. Connection kit for mounting pumps, DN 40 ISO-KF

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  3. HV gate valve, DN 250 ISO-F, electro-pneumatic, PI (RS)/PV 24 V DC, SS/FKM

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Item 1 of 3
  • Ideal for ion implantation systems
  • Optimized pumping speed for light gases
  • The nickel-plated rotor guarantees resistivity to the dopants used
  • The intelligent temperature management system reduces process condensation and deposits
  • Semi S2 and UL/CSA certification

  • Ideal for ion implantation systems
  • Optimized pumping speed for light gases
  • The nickel-plated rotor guarantees resistivity to the dopants used
  • The intelligent temperature management system reduces process condensation and deposits
  • Semi S2 and UL/CSA certification

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