Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for solar, flat panel and semiconductor applications and harsh processes with high gas temperatures, such as etch and CVD, excellent powder handling, tantal coated screw for harsh applications, Low cost of ownership, minimal maintenance, long service intervals, high uptime, high hydrogen throughput, low energy consumption, variable temperature control, Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame, low vibration level
Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition, Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput, Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame
Don't worry we won't leave you in a vacuum